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series picture
series picture
CELOS by DMG MORI

ULTRASONIC MicroDrill Series

> 10,000 holes process reliable in one workpiece

Highlights
  • Highly stable and efficient drilling for mass production in semiconductor industry
  • 35,000 rpm drilling spindle
  • For the smallest tool diameter from ø 0.1 mm
  • Drilling force control for process stability (< 1 N)
Technical Data
Max. X-axis stroke
550 mm
Max. Y-axis stroke
550 mm
Max. Z-axis stroke
510 mm
Max. workpiece diameter
500 mm
Max. workpiece height
400 mm
Max. workpiece weight
600 kg
Control & Software
  • SIEMENS SINUMERIK ONE
Max. X-axis stroke
Max. Y-axis stroke
Max. Z-axis stroke
Max. workpiece diameter
Max. workpiece height
Max. workpiece weight
product teaser picture
ULTRASONIC 55 MicroDrill
550 mm
550 mm
510 mm
500 mm
400 mm
600 kg
Details

ULTRASONIC Series

The ULTRASONIC-technology allows an economical grinding, milling and drilling of hard and brittle Advanced Materials with up to 50% reduced process forces.

ULTRASONIC MicroDrill

With the ULTRASONIC 55 MicroDrill, DMG MORI specifically serves the niche for the process-reliable production of micro-holes in the semiconductor industry. The specially developed micro-drilling spindle allows ultrasonic-assisted drilling from ø 0.1 mm* and is therefore the perfect choice for mass production in glass and ceramics.
*depending on material/parameter